MICRO-ELECTROMECHANICAL SYSTEM AND METHOD FOR MANUFACTURING A MICRO-ELECTROMECHANICAL SYSTEM

摘要

A microelectromechanical system (200) is disclosed, comprising a first element (202), a second element (204) which is movable relative to the first element (202), a contact element (206) having a first portion (210). and a second portion (212), wherein the contact member (206) is connected to the first member (202) at the first portion (210) and abuts the second member (204) at the second portion (212), and wherein Contact element (206) due to a relative movement of the first and second elements (202, 204) is deformable relative to each other, and a sensor (208) for detecting the deformation of the contact element (206).