Embodiment, transport device and a semiconductor fabricating apparatus

摘要

Table means (100), comprising:a first element (1), which can move within a predetermined plane;a second element (2), which can move relative to the first element;a first guide member (4), the at least a part comprising on the first element is arranged, and the second element in such a way that a movement of the first element, has the consequence that the second element in a direction parallel to a first axis is moved, which is orthogonal to the predetermined plane is;a table (10), to which a first carried by the second element part (10p); anda plurality of second guide units (5), wherein each of the second guide units at least a part with a corresponding one of the second parts (10r) of the table is connected, wherein the second sections around the first part are arranged, wherein the second guide units so the table, lead to the table in the direction parallel to the first axis moves.