METHOD FOR FABRICATING SEMICONDUCTOR DEVICE, AUTOMATIC OPERATION METHOD OF SEMICONDUCTOR FABRICATING APPARATUS, AUTOMATIC OPERATION SYSTEM OF SEMICONDUCTOR FABRICATING APPARATUS AND AUTOMATIC OPERATING METHOD OF CMP APPARATUS TO MAXIMUMLY INCREASE OPERATING RATIO AND IMPROVE THROUGHPUT

摘要

PURPOSE: A method for fabricating a semiconductor device is provided to maximumly increase an operating ratio and improve throughput by minimizing an interval of standby time of an operator. CONSTITUTION: A process condition of a product wafer is transferred from a host computer(19) to a semiconductor fabricating apparatus. According to a predetermined process condition, a dummy wafer is automatically processed in the semiconductor fabricating apparatus. According to the transferred process condition of the product wafer, the product wafer is processed in the semiconductor fabricating apparatus.