METHOD FOR PROCESSING POLYCRYSTALLINE MATERIAL SURFACE, AND METHOD FOR BONDING POLYCRYSTALLINE MATERIAL PROCESSED BY USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for processing a polycrystalline material surface, by which a surface of a polycrystalline material can be polished with a roughness of a nanometer order.SOLUTION: A method for processing a polycrystalline material surface comprises the steps of performing the removal of a convex portion and the regeneration of an amorphous coating within a thickness of the amorphous coating which is present in a polycrystalline material surface, thereby performing the smoothing with a nanometer-order roughness.SELECTED DRAWING: Figure 1