METHOD FOR FORMING ACIGS THIN FILM AT LOW-TEMPERATURE AND METHOD FOR MANUFACTURING SOLAR CELL USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for forming an ACIGS based thin film having high efficiency, applied as the light absorption layer of a solar cell and formed at a relatively low temperature using a simple method.SOLUTION: The method for forming an ACIGS based thin film comprises: the step of forming an Ag thin film; and the ACIGS formation step of vapor-depositing Cu, In, Ga and Se by a simultaneous vacuum deposition method on the surface of the Ag thin film. All Ag constituting the Ag thin film are diffused in the step of vapor-depositing Cu, In, Ga, and Se, and an ACIGS is formed by simultaneously vacuum-deposited Cu, In, Ga and Se during the ACIGS formation step. The ACIGS thin film having an improved power generation efficiency is formed only by a one step simultaneous vacuum deposition method of forming the Ag thin film and simultaneously vacuum depositing CIGS elements at a relatively low temperature of 400°C or less, preferably 300-400°C. The content of the Ag included in the ACIGS thin film is preferably 0.05-0.25 in an Ag/(Ag+Cu) ratio.SELECTED DRAWING: None