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SUBSTRATE PRODUCTION MANAGEMENT APPARATUS, SUBSTRATE PRODUCTION DEVICE, AND SUBSTRATE PRODUCTION LINE

机译:基板生产管理装置,基板生产设备和基板生产线

摘要

PROBLEM TO BE SOLVED: To provide a substrate production management apparatus capable of contributing to at least one of remarkable energy saving effects and high process work quality.SOLUTION: The present invention relates to a substrate production management apparatus 2 configured to constitute a substrate production line 1 together with multiple substrate production devices 41-48 and further to manage the multiple substrate production devices. The substrate production management apparatus comprises: a production time acquisition part (step S2) for acquiring a production time Tp(i) of each of the multiple substrate production devices; a substrate presence/absence confirmation part (step S3) for confirming the presence/absence of substrates in the multiple substrate production devices; predetermined time prediction part (steps S6 and S7) for predicting at least either a predetermined substrate carry-in time t3(i) or a predetermined substrate carry-out time t4(i) of each of the multiple substrate production devices based on the production time Tp(i) and the presence/absence of substrates; and a predetermined time notification part (step S10) for notifying each substrate production device of at least the one predetermined time of each of the multiple substrate production devices.SELECTED DRAWING: Figure 3
机译:解决的问题:提供一种基板生产管理设备,其能够有助于显着的节能效果和高工艺工作质量中的至少一个。解决方案:本发明涉及构造成构成基板生产线的基板生产管理设备2。图1所示的实施例与多个基板生产设备41-48一起进行,并且进一步管理多个基板生产设备。基板生产管理装置包括:生产时间获取部分(步骤S2),用于获取多个基板生产设备中的每一个的生产时间Tp(i);和基板存在/不存在确认部分(步骤S3),用于确认多个基板生产装置中基板的存在/不存在;预定时间预测部分(步骤S6和S7),用于基于生产来预测多个基板生产装置中的每一个的至少预定基板搬入时间t3(i)或预定基板搬出时间t4(i)。时间Tp(i)和是否存在底物;预定时间通知部分(步骤S10),用于将多个衬底生产设备中的每一个的至少一个预定时间通知每个衬底生产设备。

著录项

  • 公开/公告号JP2017174995A

    专利类型

  • 公开/公告日2017-09-28

    原文格式PDF

  • 申请/专利权人 FUJI MACH MFG CO LTD;

    申请/专利号JP20160059983

  • 发明设计人 SHIMIZU KOJI;

    申请日2016-03-24

  • 分类号H05K13/02;G05B19/418;

  • 国家 JP

  • 入库时间 2022-08-21 14:00:31

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