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SUBSTRATE PRODUCTION MANAGEMENT APPARATUS, SUBSTRATE PRODUCTION DEVICE, AND SUBSTRATE PRODUCTION LINE
SUBSTRATE PRODUCTION MANAGEMENT APPARATUS, SUBSTRATE PRODUCTION DEVICE, AND SUBSTRATE PRODUCTION LINE
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机译:基板生产管理装置,基板生产设备和基板生产线
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摘要
PROBLEM TO BE SOLVED: To provide a substrate production management apparatus capable of contributing to at least one of remarkable energy saving effects and high process work quality.SOLUTION: The present invention relates to a substrate production management apparatus 2 configured to constitute a substrate production line 1 together with multiple substrate production devices 41-48 and further to manage the multiple substrate production devices. The substrate production management apparatus comprises: a production time acquisition part (step S2) for acquiring a production time Tp(i) of each of the multiple substrate production devices; a substrate presence/absence confirmation part (step S3) for confirming the presence/absence of substrates in the multiple substrate production devices; predetermined time prediction part (steps S6 and S7) for predicting at least either a predetermined substrate carry-in time t3(i) or a predetermined substrate carry-out time t4(i) of each of the multiple substrate production devices based on the production time Tp(i) and the presence/absence of substrates; and a predetermined time notification part (step S10) for notifying each substrate production device of at least the one predetermined time of each of the multiple substrate production devices.SELECTED DRAWING: Figure 3
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