首页>
外国专利>
Substrate transport apparatus, substrate delivery position confirmation method and substrate processing system
Substrate transport apparatus, substrate delivery position confirmation method and substrate processing system
展开▼
机译:基板输送装置,基板交接位置确认方法及基板处理系统
展开▼
页面导航
摘要
著录项
相似文献
摘要
A loader module of a substrate processing system includes a transportation arm configured to move towards a wafer accommodated in a carrier and receive the wafer, and a control unit configured to confirm a delivery position of the wafer based on an upward movement amount of an end effector of the transportation arm, and a contact sound generated when the end effector comes in contact with the wafer. The control unit confirms the delivery position of the wafer based on an average height of the end effector when the contact sound of each pad of the end effector comes in contact with the wafer to generate a contact sound a plurality of times.
展开▼