Template substrate, template for nanoimprint, and method for producing nanoimprint template

摘要

PROBLEM TO BE SOLVED: To provide a template substrate capable of allowing the time of a drying step of a template to be shortened and to provide another template for nanoimprint and a production method of the template for nanoimprint.SOLUTION: The template substrate is configured so that the bottom surface of a concave structure to be formed on the opposite-side surface of the surface, on which a transfer pattern is formed, of the template substrate is made parallel to the surface, on which the transfer pattern is formed, thereof and the wall surface of the concave structure has such a slope that an opening is widened as it goes from the bottom surface to the open end thereof.