Template laminating substrate, template blank, template for nanoimprint, method of reproducing template substrate, and method of manufacturing laminated substrate for template

摘要

PROBLEM TO BE SOLVED: To provide a multilayer substrate for template which allows for easy regeneration of a template substrate without requiring an advanced polishing technique, while suppressing increase in the manufacturing cost of a template for nanoimprint, and to provide a template blank, a template for nanoimprint, and a method of regenerating a template substrate, and a method of manufacturing a multilayer substrate for template.SOLUTION: On a template substrate, an intermediate layer and a transfer patterning layer composed of a predetermined material are laminated, and a transfer pattern is formed on the transfer patterning layer. When regenerating the template substrate, the transfer patterning layer is removed by a predetermined etching method.