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A method for distinguishing anomalous spectral profiles from spectral profiles measured with a chromatic range sensor

机译:一种将异常光谱轮廓与用色度传感器测量的光谱轮廓区分开的方法

摘要

A method for operating a chromatic range sensor (CRS) system to identify abnormal spectral profiles arising from light reflected from more than one portion of a workpiece surface is provided. The method comprises: providing a CRS system comprising: an optical element, a light source, and CRS electronics comprising a CRS wavelength detector; operating the CRS system to receive an output spectral profile from a measurement point on a workpiece surface and provide corresponding output spectral profile data; analyzing the output spectral profile data to provide a peak region asymmetry characterization; and providing a corresponding abnormality indicator if the peak region asymmetry characterization indicates that the peak region is abnormally asymmetric.
机译:提供一种用于操作色度范围传感器(CRS)系统以识别由从工件表面的一个以上部分反射的光引起的异常光谱轮廓的方法。该方法包括:提供一种CRS系统,其包括:光学元件,光源以及包括CRS波长检测器的CRS电子设备;操作CRS系统以从工件表面上的测量点接收输出光谱轮廓,并提供相应的输出光谱轮廓数据;分析输出光谱轮廓数据以提供峰区不对称性表征;如果所述峰区域不对称特征表明所述峰区域异常不对称,则提供相应的异常指示。

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