Method for producing an article having a needle-like zinc oxide crystals, a method of manufacturing a field effect transistor, a method for fabricating an electronic device

摘要

PROBLEM TO BE SOLVED: To provide: a manufacturing method of an article including an acicular zinc oxide crystal that can manufacture an article including a high quality acicular zinc oxide crystal that can operate a TFT, by a film precipitation process in non-vacuum environment and at a low temperature; the article including an acicular zinc oxide crystal manufactured by the manufacturing method; a field effect transistor; an electronic device; a manufacturing apparatus of the article including an acicular zinc oxide crystal; a manufacturing method of an electronic device; and a manufacturing apparatus of the electronic device.;SOLUTION: A manufacturing method of an article including an acicular zinc oxide crystal is that a liquid containing supersaturated zinc acid ions is made to adhere to a substrate surface, and acicular zinc oxide crystals are precipitated from the liquid onto the substrate surface.;COPYRIGHT: (C)2014,JPO&INPIT