MANUFACTURING METHOD OF ARTICLE INCLUDING ACICULAR ZINC OXIDE CRYSTAL, ARTICLE INCLUDING ACICULAR ZINC OXIDE CRYSTAL, FIELD EFFECT TRANSISTOR, ELECTRONIC DEVICE, MANUFACTURING APPARATUS OF ARTICLE INCLUDING ACICULAR ZINC OXIDE CRYSTAL, MANUFACTURING METHOD OF ELECTRONIC DEVICE, AND MANUFACTURING APPARATUS OF ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide: a manufacturing method of an article including an acicular zinc oxide crystal that can manufacture an article including a high quality acicular zinc oxide crystal that can operate a TFT, by a film precipitation process in non-vacuum environment and at a low temperature; the article including an acicular zinc oxide crystal manufactured by the manufacturing method; a field effect transistor; an electronic device; a manufacturing apparatus of the article including an acicular zinc oxide crystal; a manufacturing method of an electronic device; and a manufacturing apparatus of the electronic device.;SOLUTION: A manufacturing method of an article including an acicular zinc oxide crystal is that a liquid containing supersaturated zinc acid ions is made to adhere to a substrate surface, and acicular zinc oxide crystals are precipitated from the liquid onto the substrate surface.;COPYRIGHT: (C)2014,JPO&INPIT