Laser annealing apparatus, continuous conveyance path for laser annealing treatment, laser light irradiation means, and laser annealing treatment method

摘要

In the laser annealing apparatus 1 that performs the annealing process by irradiating the object to be processed 100 with the laser beam 42, the object to be processed 100 is conveyed by the continuous conveyance path 2 and the continuous conveyance path 2. Laser beam irradiation means for irradiating the workpiece 100 with the laser beam 42, and the continuous conveyance path 2 is a part of the continuous conveyance path 2, and the workpiece 100 is placed upstream of the continuous conveyance path 2. A carry-in conveyance path 2a that carries in and conveys, and a part of the continuous conveyance path 2, and irradiates the workpiece 100 with laser light 42 while conveying the workpiece 100 on the downstream side of the carry-in conveyance path 2a. An irradiation area conveyance path 2b that performs annealing treatment, and a carry-out conveyance path that is a part of the continuous conveyance path 2 and is carried out while conveying the workpiece 100 that has undergone the annealing process on the downstream side of the irradiation area conveyance path 2b. 2c.