LASER ANNEALING DEVICE SERIAL CONVEYANCE PATH FOR LASER ANNEALING LASER BEAM RADIATION MEANS AND LASER ANNEALING METHOD

摘要

A laser annealing apparatus (1) for performing an annealing process by irradiating a laser beam (42) to an object to be processed (100), comprising a continuous transport path (2) for transporting the object to be processed (100) continuously in a predetermined direction, And a laser beam irradiating means for irradiating the object to be processed 100 with the laser beam 42 to be conveyed by the continuous conveying path 2 as a part of the continuous conveying path 2, A transfer conveying path 2a for conveying the object to be processed 100 on the upstream side of the conveying path 2 and for conveying the object 100 to be processed 100 on the downstream side of the conveying conveying path 2a as a part of the continuous conveying path 2 (2b) as a part of the continuous conveying route (2) and a downstream side of the irradiated area conveying route (2b) as a part of the continuous conveying route (2) for carrying out the annealing process by irradiating the subject (100) And a carry-out conveying path 2c for conveying the object to be processed 100 through the annealing process.