Laser annealing apparatus, continuous conveyance path for laser annealing treatment, and laser annealing treatment method

摘要

A laser annealing device (1) for performing annealing on objects to be processed (100) by radiating a laser beam (42) thereon, wherein the laser annealing device (1) is provided with a serial conveyance path (2) for serially conveying the objects to be processed (100) in a fixed direction, and a laser beam radiation means for radiating the laser beam (42) on the objects to be processed (100), which are conveyed on the serial conveyance path (2). The serial conveyance path (2) has: an entrance conveyance path (2a), which is a portion of the serial conveyance path (2), for carrying in and conveying the objects to be processed (100) in the upstream direction of the serial conveyance path (2); a radiation region conveyance path (2b), which is a portion of the serial conveyance path (2) and which is located downstream from the entrance conveyance path (2a), for radiating the laser beam (42) on the objects to be processed (100) so as to anneal these objects while conveying the same; and an exit conveyance path (2c), which is a portion of the serial conveyance path (2), for carrying out the objects to be processed (100) while conveying these objects downstream from the radiation region conveyance path (2b) after the objects to be processed (100) have been annealed.