Method for manufacturing metal carbonitride film or semimetal carbonitride film, apparatus for producing metal carbonitride film or semi-metal carbonitride film, metal carbonitride film or semimetal carbonitride film

摘要

A method and an apparatus capable of forming a metal carbonitride film or a semimetal carbonitride film at a low temperature are provided. A plurality of R's may be the same or different and each represents a hydrogen atom, a linear, branched or cyclic alkyl group having 1 to 5 carbon atoms , Or a trialkylsilyl group having 1 to 9 carbon atoms, provided that a plurality of R's may be bonded to each other to form a ring), a nitrogen source containing a guanidine compound represented by a metal source Or semimetal source are supplied onto the object to be film-formed to form a metal carbon nitride film or a semi-metal carbonitride film.