METHOD FOR PRODUCING METAL CARBONITRIDE FILM OR METALLOID CARBONITRIDE FILM METAL CARBONITRIDE FILM OR METALLOID CARBONITRIDE FILM AND APPARATUS FOR PRODUCING METAL CARBONITRIDE FILM OR METALLOID CARBONITRIDE FILM

摘要

A method and an apparatus capable of forming a metal carbonitride film or a semi-metal carbonitride film at a low temperature are provided.In general formula (1) (Wherein the plurality of R's may be the same or different and each represents a hydrogen atom, a straight, branched or cyclic alkyl group of 1 to 5 carbon atoms, or a trialkylsilyl group of 1 to 9 carbon atoms. And a plurality of Rs may be bonded to each other to form a ring)And a metal source or a semimetal source is supplied onto the object to be film-formed to form a metal or nitride film or a semi-metal nitride film.