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In-Cu Alloy Sputtering Target And Method For Producing The Same
In-Cu Alloy Sputtering Target And Method For Producing The Same
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机译:In-Cu合金溅射靶及其制造方法
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摘要
The purpose of the present invention is to provide an In—Cu alloy sputtering target member having high compositional homogeneity in the thickness direction. The present invention provides a sputtering target member having a composition containing from 1 to 70 at. % of Cu relative to a total number of atoms of In and Cu, the balance being In and inevitable impurities, wherein the target member fulfills 0.95≦A/B≦1, where A represents a Cu atomic concentration relative to the total number of atoms of In and Cu in one half of a thickness direction; B represents a Cu atomic concentration relative to the total number of atoms of In and Cu in the other half of the thickness direction; and B≧A; and wherein a number of pores having a size of 100 μm or more is less than 10/cm2 on average.
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机译:本发明的目的是提供一种In-Cu合金溅射靶构件,其在厚度方向上具有高组成均匀性。本发明提供一种溅射靶构件,其具有包含1〜70at。%的组成。相对于In和Cu的原子总数的Cu的百分比,余量为In和不可避免的杂质,其中目标元素满足0.95≤A/B≤1,其中A表示相对于原子总数的Cu原子浓度In和Cu在厚度方向的一半处; B表示相对于厚度方向的另一半的In和Cu的原子总数的Cu原子浓度。 B≥A;并且其中尺寸为100μm或更大的孔的数量平均小于10 / cm 2 Sup>。
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