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Magnetron Sputtering as a Fabrication Method for a Biodegradable Fe32Mn Alloy

机译:磁控溅射作为可生物降解的Fe32Mn合金的制备方法

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摘要

Biodegradable metals are a topic of great interest and Fe-based materials are prominent examples. The research task is to find a suitable compromise between mechanical, corrosion, and magnetic properties. For this purpose, investigations regarding alternative fabrication processes are important. In the present study, magnetron sputtering technology in combination with UV-lithography was used in order to fabricate freestanding, microstructured Fe32Mn films. To adjust the microstructure and crystalline phase composition with respect to the requirements, the foils were post-deposition annealed under a reducing atmosphere. The microstructure and crystalline phase composition were investigated by scanning electron microscopy, energy dispersive X-ray spectroscopy, and X-ray diffraction. Furthermore, for mechanical characterization, uniaxial tensile tests were performed. The in vitro corrosion rates were determined by electrochemical polarization measurements in pseudo-physiological solution. Additionally, the magnetic properties were measured via vibrating sample magnetometry. The foils showed a fine-grained structure and a tensile strength of 712 MPa, which is approximately a factor of two higher compared to the sputtered pure Fe reference material. The yield strength was observed to be even higher than values reported in literature for alloys with similar composition. Against expectations, the corrosion rates were found to be lower in comparison to pure Fe. Since the annealed foils exist in the austenitic, and antiferromagnetic γ-phase, an additional advantage of the FeMn foils is the low magnetic saturation polarization of 0.003 T, compared to Fe with 1.978 T. This value is even lower compared to the SS 316L steel acting as a gold standard for implants, and thus enhances the MRI compatibility of the material. The study demonstrates that magnetron sputtering in combination with UV-lithography is a new concept for the fabrication of already in situ geometrically structured FeMn-based foils with promising mechanical and magnetic properties.
机译:可生物降解的金属是人们非常感兴趣的话题,而铁基材料是突出的例子。研究任务是在机械,腐蚀和磁性之间找到合适的折衷方案。为此,有关替代制造工艺的研究很重要。在本研究中,磁控管溅射技术与UV光刻技术结合使用,以制造独立的微结构Fe32Mn膜。为了相对于要求调节微结构和晶相组成,将箔在还原气氛下进行后沉积退火。通过扫描电子显微镜,能量色散X射线光谱和X射线衍射研究了显微结构和晶相组成。此外,为了进行机械表征,进行了单轴拉伸试验。通过在伪生理溶液中的电化学极化测量来确定体外腐蚀速率。另外,通过振动样品磁力测定法测量磁性能。箔片显示出细晶粒的结构,抗张强度为712 MPa,与溅射的纯铁参比材料相比,其强度高出约两倍。观察到屈服强度甚至比文献中报道的具有相似组成的合金更高。出乎意料的是,发现腐蚀速率比纯铁低。由于退火后的箔片存在于奥氏体和反铁磁性的γ相中,因此,FeMn箔片的另一个优点是与1.978 T的Fe相比,磁饱和极化强度低,为0.003T。与SS 316L钢相比,该值甚至更低作为植入物的金标准,从而增强了材料的MRI兼容性。研究表明,磁控溅射与紫外光刻技术结合使用是一种新的概念,用于制造已经就位的具有几何结构的,具有良好的机械和磁性性能的铁锰基箔。

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