The cell micro machined transducer, capacitive, pre - San Jose, and method of manufacture of a cell of micro machined capacitive transducer, pre - San Jose,

摘要

Abstract cell micro machined transducer, capacitive, pre - San Jose, and method of manufacture of a cell of micro machined capacitive transducer, pre - San Jose, the present invention relates to a cell of micro machined transducer, capacitive, pre - San Jose (10) comprising a substr Act (12) and a membrane (14) which covers an area of total membrane (atotal)In which a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane comprising an aperture (15), and a part of the edge (14a) surrounding the hole (15).The cell (10) comprises a layer of voltage (17) on the membrane (14), the layer (17) voltage having a voltage value predetermined in relation to the membrane (14), the layer of tension (17) being adapted to provide a bending moment in the membrane (14) in a direction for the substrate. (12) so that the part of the edge (14a) of the membrane (14) is San Jose to substrate (12).The present invention relates to a method for the manufacture of the cell micro machined transducer, capacitive, pre - San Jose (10).