The cell transdutora capacitive micromecanizada pre - San Jose and method of manufacture of a cell transdutora capacitive micromecanizada pre - San Jose

摘要

Summary transdutora capacitive cell micromecanizada pre - San Jose and method of manufacture of a cell transdutora capacitive micromecanizada pre - San Jose this invention refers to a cell transdutora capacitive micromecanizada pre - San Jose (10) comprising a substrate ( 12) that includes a first electrode (16), a membrane (14) which includes a second electrode (18).In the cell has an outer region (22), in which the membrane (14) is mounted to the substrate (12), and an internal region (20) within or surrounded by the external region (22), in which the membrane (14) is San Jose in the substrate (12) in a first region of the form annul San Jose (24) located In the internal region (20). 1 / 1