Laser Applications in Microelectronic and Optoelectronic Manufacturing V. Volume 3933, Held at San Jose, CA, on 24-26 January 2000

摘要

This proceedings contains papers on the following topics: fundamental processes of laser material interaction phenomenon, laser material processing techniques, pulsed-laser deposition, and laser microengineering. The latter topic was added to LAMOM V and reflects the strong growth in the application of lasers to micromachining, 3D fabrication, and microtexturing operations.