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METHOD FOR PRODUCING GALLIUM TRICHLORIDE GAS AND METHOD FOR PRODUCING NITRIDE SEMICONDUCTOR CRYSTAL
METHOD FOR PRODUCING GALLIUM TRICHLORIDE GAS AND METHOD FOR PRODUCING NITRIDE SEMICONDUCTOR CRYSTAL
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机译:碲化镓气体的制备方法和氮化物半导体晶体的制备方法
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摘要
According to the invention, there is provided a method for producing a gallium trichloride gas, the method including: a first step of reacting a metallic gallium and a chlorine gas to produce a gallium monochloride gas; and a second step of reacting the produced gallium monochloride gas and a chlorine gas to produce a gallium trichloride gas.
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