METHOD FOR PRODUCING GALLIUM TRICHLORIDE GAS AND METHOD FOR PRODUCING NITRIDE SEMICONDUCTOR CRYSTAL

摘要

In the present invention, phosphorus trichloride gallium gas having a second step of metal gallium and reacting chlorine gas days to the first step, a creation date gallium chloride gas and chlorine gas the reaction for generating gallium chloride gas generated trichloride gallium gas It provides a process for the production of.