LOW TEMPERATURE CO-FIRED CERAMIC (LTCC) COPLANAR WAVEGUIDE

摘要

THE PRESENT INVENTION DISCLOSES A 123µM LINE WIDTH RESOLUTION BASED ON A COPLANAR WAVEGUIDE (CPW) OF TRANSMISSION LINES BY INCORPORATING THE LOW TEMPERATURE CO-FIRED CERAMIC (LTCC) DIELECTRIC SUBSTRATE. THE CPW COMPRISES AN UPPERMOST CONDUCTING LAYER (1), AN INTERMEDIATE CONDUCTING LAYER (2,3,4,5) AND A LOWERMOST LAYER (6). THE UPPERMOST CONDUCTING LAYER (1) INCLUDES A MEDIAN SIGNAL LINE (11) SEPARATED BY A SLIT FROM A FIRST AND SECOND GROUNDING PLANE (12). THE UPPERMOST CONDUCTING LAYER (1), THE INTERMEDIATE CONDUCTING LAYER (2,3,4,5) AND THE LOWERMOST CONDUCTING LAYER (6) ARE DISPOSED ON THE LTCC DIELECTRIC SUBSTRATE. (FIGURE 5)