PROBE SENSING METHOD AND APPARATUS BASED ON OPTICAL BEAM SCANNING CONFOCAL DETECTION TECHNIQUE

摘要

A probe sensing method and apparatus based on an optical beam scanning confocal detection technique. The method comprises: laser beams are incident to the interior of an optical fibre probe (1) from an incident end of the optical fibre probe (1) via a lens; incident beams are emergent from the incident end of the optical fibre probe (1) after being reflected by an optical fibre grating structure (1c) in the interior of the optical fibre probe (1); emergent beams of the optical fibre probe (1) are focused to a photoelectric detector via the lens; lateral photoelectric detectors (7, 16) are used to detect the position of a focused light spot to measure the lateral displacement of the optical fibre probe (1); and an axial photoelectric detector (19) is used to detect light intensity of the focused light spot to measure the axial displacement of the optical fibre probe (1) for completing three-dimensional sensing. The method and apparatus have the characteristics that a probe is easy to manufacture and easy to miniaturize, detection light has high intensity and is easy to detect, and the apparatus has capacities of three-dimensional detection and demodulation, and a high resolution.