COMBINED CANTILEVER BEAM AND PROBE SENSING METHOD AND APPARATUS BASED ON OPTICAL FIBRE EMERGENT LIGHT DETECTION

摘要

Provided are a combined cantilever beam (4) and probe (7) sensing method and apparatus based on optical fibre (2) emergent light detection, which falls within the technical field of dimensional measurement. Laser beams are focused by a lens (5) after being emitted via an optical fibre (2); the position of a focused light spot is detected by a photoelectric detector (6); when coming in contact with an object, the probe (7) drives the displacement of an emergent end of the optical fibre (2), which causes the displacement of the position of a light spot formed on the photoelectric detector (6) by focusing emergent light so as to complete sensing. The apparatus is formed by assembling a laser (1), an optical fibre (2), a clamp holder (3), a lens (5), a photoelectric detector (6), and a probe (7). The characteristics thereof are that: the probe (7) is easy to manufacture and meets the requirement of miniaturization, detection light has high intensity and is easy to detect, the probe has the capacity of three-dimensional detection and a strong resolution, and the overall apparatus is simple and small.