Near-field scanning optical microscopy probe fabrication using focused ion beam milling technique

摘要

Summary form only given. In this work we have developed a method for fabricating clean, well-defined, and highly reproducible subwavelength apertures for near-field scanning optical microscopy (NSOM) applications using a focused ion beam (FIB) milling technique. Fiber probes were produced through the use of a heating-pulling process. The pulled fiber probes were then uniformly coated all over with a 100-150 nm aluminum film in batches of 10-15 fibers with a sputtering unit usually used to metal coat specimens prior to inspection by scanning electron microscopy (SEM). The coating is smooth and exhibits no leakage or pin holes upon injection of laser light into such fiber probes.