An ion source liner 204 comprises a plate having an exposure surface. The plate comprises a hole and a lip 234 surrounding the hole and extending outward from the exposure surface, and optionally a recess having a second surface recessed from the exposure surface and surrounding the hole. Further disclosed are an arc chamber 202, comprising said said ion source liner and an electrode 208 (e.g. a repeller 248) having a shaft 218 and a head 250, wherein the electrode passes though said hole and defines an annular gap 206 between the plate and the shaft; as well as an ion source comprising said arc chamber, wherein the arc chamber has body defining an interior region 212, in which said exposure surface is exposed to a plasma generated within said arc chamber, and wherein the electrode is electrically isolated from the body. The lip 234 generally prevents particulate contaminants 248' from entering the annular gap 206.
展开▼
