BALANCE MASS SYSTEM SHARED BY WORKPIECE TABLE AND MASK TABLE AND LITHOGRAPHY MACHINE

摘要

The present invention relates to a balance mass system in which a workpiece table and a mask table are shared, comprising a first part (11) for installing a workpiece table system; A second portion (20) for installing a mask table system; And a third portion (14) for connecting the first portion (11) and the second portion (20), and a drift preventing and compensating device (16), wherein the first portion of the balancing mass Is supported to float on the base frame 1 of the exposure machine and the third part 14 of the balance mass is connected to the base frame 1 via the drift preventing and compensating device 16, (16) is installed close to the center of gravity position of the entire balance mass. The balance mass system saves the external holder of the mask table system, reduces the volume and weight of the exposure system, reduces the mass of the required balance mass, and makes the overall structure more compact.;