INSPECTING APPARATUS DECOMPRESSION DRYING APPARATUS AND CONTROL METHOD OF DECOMPRESSION DRYING APPARATUS

摘要

An object of the present invention is to provide an inspection apparatus capable of early detecting the dry state of a coated region coated with an organic material on a substrate, a decompression drying apparatus and a control method of decompression drying apparatus. The inspection apparatus according to an embodiment of the present invention includes an image pickup part and a dry state detection part. The image pickup part photographs an application region coated with an organic material on the substrate. The dry state detection part detects the dry state of the application region based on the color density of the application region imaged by the image pickup part.