LIPON TFB LIPON SPECIAL LIPON MASK TO INCREASE LIPON IONIC CONDUCTIVITY AND TFB FABRICATION YIELD

摘要

According to general aspects, embodiments of the present disclosure relate to a specific mask design that not only increases the ion conductivity of the deposited LiPON layer but also increases device yield by reducing damage to the deposited layer from the RF plasma will be. In embodiments, the mask includes a conductive bottom surface facing the substrate during deposition, and a non-conductive opposite top side. According to aspects of the present disclosure, the conductive portion of the mask at the bottom side allows the formation of a weak secondary localized plasma (or greater plasma immersion) to improve nitrogen incorporation into the LiPON film. The non-conductive top side will inhibit local micro-arcing, which will limit plasma induced damage to the film being grown.