METHOD OF MANUFACTURING POROUS NOBLE METAL THIN FILMS AND POROUS NOBLE METAL THIN FILMS MANUFACTURED THEREFROM

摘要

The present invention relates to a method of manufacturing a porous noble metal thin film by an O2 plasma de-alloying process in which a carbon noble metal thin film is formed, and then carbon atoms in the thin film selectively removed using oxygen plasma. According to the present invention, since an entire process of fabricating the porous noble metal thin film structure is performed only by a dry process; the present invention is able to be used in various fields such as a catalyst, a sensor, a fuel cell electrode, and an energy storage device which are application fields of a porous thin film due to clean process and high reproducibility when compared with a case of using a wet process such as an electrochemical decomposition method or an optional dissolution method; and moreover, is able to be mass produced.;COPYRIGHT KIPO 2017