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Adaptive Newson's filter

机译:自适应牛逊滤波器

摘要

A method and system are provided for generating test results for a sample using an adaptive Newswens filter. One method is to detect during the examination of a sample having values for at least one feature of events that is closer to at least one value of at least one parameter of the Newson filter than values for at least one feature of another part of events Lt; / RTI selected events. The method also includes the steps of obtaining an output of the output acquisition subsystem for a sample of events, classifying events in the sample based on the obtained output, and determining one or more parameters of the Newsween filter based on the results of the classification And determining if it should be corrected. The Newson's filter or the modified Newson's filter may then be applied to the results of the inspection of the specimen to produce the final inspection results of the specimen.
机译:提供了一种用于使用自适应Newswens滤波器生成样品的测试结果的方法和系统。一种方法是在检查样本期间检测事件的至少一个特征的值比事件另一部分的至少一个特征的至少一个值更接近牛顿滤波器的至少一个参数的至少一个值的事件; / RTI>选定事件。该方法还包括以下步骤:获取事件样本的输出获取子系统的输出;基于所获取的输出对样本中的事件进行分类;以及基于分类结果确定Newsween过滤器的一个或多个参数。确定是否应该更正。然后可以将牛顿过滤器或改进的牛逊过滤器应用于样本的检查结果,以产生样本的最终检查结果。

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