METHODS OF SOLID PHASE RECRYSTALLIZATION OF THIN FILM USING PULSE TRAIN ANNEALING METHOD

摘要

The present invention provides methods for solid-phase recrystallization of thin films using a plurality of pulses of electromagnetic energy. In one embodiment, the methods of the present invention are directed to crystalline seed regions in which an amorphous layer is deposited on top to recrystallize the amorphous layer so as to have the same grain structure and crystal orientation as the grain structure and crystal orientation of the base crystalline seed region or layer Or by transferring a plurality of pulses of energy into a layer, to anneal the entire substrate surface or selected regions of the surface of the substrate.;