METHODS OF SOLID PHASE RECRYSTALLIZATION OF THIN FILM USING PULSE TRAIN ANNEALING METHOD

摘要

The present invention , a thin film using a plurality of pulses of electromagnetic energy crystallized solid phase recrystallization method provides . In one embodiment, the method of the invention , the base region , the layer- crystalline seed crystal orientation of the grain structure and the same crystal grain structure and an amorphous layer is deposited crystalline seed to the upper region so as to have in order to recrystallize the amorphous layer, an orientation or by passing a plurality of pulses of energy to the layer , can be used to anneal a selected area of the surface of the substrate or the entire substrate surface . ;