MICRO BOLOMETERS WITH IMPROVED FILL FACTOR AND METHOD OF MANUFACTURING MICRO BOLOMETERS

摘要

The micro-bolometer comprises an insulation layer, an electrode, a reflection layer, and a cover layer. The insulation layer has a first upper surface and a second upper surface lower than the first upper surface. The electrode is arranged on the first upper surface. The reflection layer is arranged on the second upper surface. The cover layer is arranged on the electrode and the reflection layer, is configured to define a cavity overlapping the reflection layer, and has a temperature varied by an absorption infrared ray.