MICRO BOLOMETERS WITH IMPROVED FILL FACTOR AND METHOD OF MANUFACTURING MICRO BOLOMETERS

摘要

The microbolometer includes an insulating layer, an electrode, a reflective layer, and a cover layer. The insulating layer has a first upper surface and a second upper surface that is lower than the first upper surface. The electrode is disposed on the first upper surface. The reflective layer is disposed on the second upper surface. The cover layer is disposed on the electrode and the reflection layer, defines a cavity overlapping the reflection layer, and the temperature is changed by absorption infrared rays.