METHOD FOR MANUFACTURING AN IMAGE SENSOR CAPABLE OF IMPROVING A FILL FACTOR OF A MICROLENS

摘要

PURPOSE: A method for manufacturing an image sensor is provided to improve a light collection efficiency with a microlens by optimizing a spherical surface of the inorganic microlens. ;CONSTITUTION: A metal wiring layer(130) is formed on a semiconductor substrate(100) including a light sensing part. An inorganic material layer is formed on the metal wiring layer. The first and the second dummy lens are formed on the inorganic material layer in order to have steps. A microlens(155) is formed by processing an etch-back step on the inorganic layer by using the first and the second dummy lens as engraving masks.;COPYRIGHT KIPO 2011