FAIL SAFE DEVICE AND VACUUM CHAMBER HAVING SAME, AND INLINE DEPOSITION SYSTEM FORMED BY VACUUM CHAMBER

摘要

Disclosed are a fail safe device, a vacuum chamber having the same, and an inline deposition system formed by the vacuum chamber. The fail safe device according to an embodiment of the present invention includes: an emergency manual operating part hermetically coupled to one opening of a vacuum chamber body in which vacuum is formed and manually operable within the vacuum chamber body; and an emergency situation detecting part disposed outside the vacuum chamber body in an area where the emergency manual operating par is disposed and detecting an operation of the emergency manual operating part as an emergency situation. The present invention can effectively prevent the occurrence of a safety accident by effectively detecting an emergency situation that is trapped in the vacuum chamber.;COPYRIGHT KIPO 2017