6-39 Design of NEG Coating Equipment for Dipole Vacuum Chamber

摘要

A novel technique is developed to turn the gas-load of the slender vacuum pipes into NEG (non-evaporationgetters) pump[1]. In the technique, the NEG films are grown by DC (Direct-Current) reactive magnetron sputteringon the inner wall of the pipes. There are many vacuum-related characteristics for NEG films, including the secondelectron yield (SEY), photon stimulated desorption (PSD) and pumping performance. Because the lowest activationtemperature is only about 180?C, TiZrV alloys getters are chosenasNEG coating[2]. This technique will be widelyused for electron, proton and heavy ion accelerators in the future.