Holding device for holding carrier or component in vacuum chamber, use of holding device for holding carrier or component in vacuum chamber, apparatus for handling carrier in vacuum chamber, and vacuum deposition system

摘要

A holding device 100 is described for holding a carrier or component in the vacuum chamber 101. The holding device 100 includes one or more electrically controllable holding elements 111; A housing 112 for at least partially embedding one or more electrically controllable holding elements 111, the housing having a receptacle 113 for one or more electrically controllable holding elements 111; A seal 114 for providing an airtight seal between the housing and one or more electrically controllable holding elements 111 arranged in the receptacle 113; And an airtight connection 115 for the electrical supply line for the one or more electrically controllable holding elements 111. Also described are a method of manufacturing a holding device, an apparatus for handling a carrier in a vacuum chamber, and a vacuum deposition system.