RF MEMS RF MEMS SWITCH

摘要

An RF MEMS switch according to an embodiment of the present invention includes a first substrate and a second substrate facing each other, a space between the first substrate and the second substrate and a space sealed between the first substrate and the second substrate A first electrode located on the first substrate in the space, a second solid electrode located on the second substrate in the space and facing the first electrode, a liquid metal layer located on the first electrode, Wherein the liquid metal layer and the nanoelectrode are spaced apart.;