Methods and apparatus are provided for determining an end point of a process chamber cleaning process. In some embodiments, a processing system having an endpoint detection system comprises: a process chamber having internal surfaces that require periodic cleaning due to processes being performed in the process chamber; And an endpoint detection system, the endpoint detection system comprising: a photodetector arranged to detect light reflected from a first inner surface of the process chamber; And a controller coupled to the photodetector and configured to determine an endpoint of the cleaning process based on the detected reflected light.
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