NEUTRALIZING JIG SUBSTRATE TREATMENT DEVICE USING SAME AND METHOD FOR NEUTRALIZING SUBSTRATE TREATMENT DEVICE

摘要

Each of the members of the substrate processing apparatus or the jig for discharging floating particles is transportable by a transport mechanism of the substrate processing apparatus and has a substrate shape that can be placed in each processing module. The charge jig includes a discharge electrode, a dielectric electrode, an ion generating electrode composed of a dielectric interposed between the discharge electrode and the dielectric electrode, a high voltage power supply circuit for applying a voltage to the discharge electrode and the dielectric electrode, And a battery for supplying energy to the high-voltage power supply circuit.