Plasma device with a three-dimensional patterned array of dielectric barrier discharges

摘要

The present invention relates to a plasma generator using a three-dimensional structure dielectric barrier discharge array capable of maximizing a generation area of a flat plate plasma by discharging a dielectric barrier discharge (DBD) by forming a three-dimensional electrode and a dielectric shape, Dimensional pattern array DBD having individual patterns formed with a first electrode layer, a dielectric layer, and a second electrode layer on each of the three-dimensional structures, a three-dimensional pattern array DBD having individual patterns formed on the respective three-The array DBD includes a discharge hole for discharging a radical generated by a hole formed corresponding to the three-dimensional structure in a regular arrangement in a planar structure facing the DBD and reacting with the plasma, and a material for reacting with the plasma around the discharge hole And a plate-like structure having a reactive material layer formed thereon.;