DIELECTRIC BARRIER-TYPE PLASMA GENERATION DEVICE AND PLASMA DISCHARGE INITIATION METHOD FOR DIELECTRIC BARRIER-TYPE PLASMA GENERATION DEVICE

摘要

A dielectric barrier-type plasma generation device comprising: a dielectric substrate; a high voltage-side electrode which is provided to a first surface side of the dielectric substrate; a low voltage-side electrode which is provided to a second surface side of the dielectric substrate; and an electricity introduction part which is provided to one end of the high voltage-side electrode, wherein a gas flow passage is formed between the dielectric substrate and the low voltage-side electrode in order to allow gas to flow from one end side to the other end side thereof, a blow-out port for blowing out gas having flowed through the gas flow passage and plasma generated in the gas flow passage is formed at the other end side of the gas flow passage, and the dielectric substrate has a portion, the thickness of which becomes increasingly thinner toward the blow-out port.