Dielectric barrier type plasma generating apparatus and plasma discharge start method of dielectric barrier type plasma generating device

摘要

Problem to be solved: to provide a dielectric barrier plasma generator capable of efficiently injecting a plasma from all regions of the air outlet.Dielectric substrate and substrateA high voltage electrode disposed on a first side of a dielectric substrate andA low voltage electrode disposed on the second side of the dielectric substrate andProvided with an electric introduction portion provided at one end of the high voltage side electrodeBetween the dielectric substrate and the low voltage side electrodeA gas flow path for supplying gas from one end side to the other end side is formed.On the other end of the gas channelGas flowing through gas channelsAndA blowing outlet for blowing out the plasma generated in the gas channel is formed.Dielectric substrateA dielectric barrier type plasma generator having a portion thinner as the thickness approaches the blowout.Diagram