PLASMA GENERATION DEVICE USING THREE-DIMENSIONAL PATTERNED ARRAY OF DIELECTRIC BARRIER DISCHARGE

摘要

The present invention relates to a plasma generation device using a three-dimensional structure dielectric barrier discharge array capable of maximizing a generation area of a flat plate plasma by discharging a dielectric barrier discharge (DBD) by forming the shape of three-dimensional electrode and dielectric. The plasma generation device comprises: a plurality of three-dimensional structures protruding from the flat plate at regular intervals; and an individual pattern array with an electrode, a dielectric, and an electrode layer, formed on the three-dimensional structure.;COPYRIGHT KIPO 2017