REACTION FORCE COMPENSATION DEVICE USING PRECOMPRESSED SPRING AND LINEAR MOTOR STAGE USING THE REACTION FORCE COMPENSATION DEVICE

摘要

A repulsive force compensating device using a full compression spring and a linear motor stage using the same are disclosed. The disclosed motor stage includes a base plate; A magnet track positioned on the base plate; A mover moving on one surface of the magnet track; And a repulsion force compensating unit including a precompressed spring connected between the magnet track and the base plate and capable of changing the stiffness to damp the repulsion force acting on the base plate by the movement of the mover, .